• DocumentCode
    3465634
  • Title

    Studies on coplanar radiation sensor based on diamond film

  • Author

    Wang, Lin-jun ; Liu, Jian-Min ; Su, Qing-Feng ; Xu, Run ; Peng, Hong-Yan ; Shi, Wei-Min ; Xia, Yi-Ben

  • Author_Institution
    Sch. of Mater. Sci. & Eng., Shanghai Univ.
  • fYear
    2006
  • fDate
    23-26 Oct. 2006
  • Firstpage
    667
  • Lastpage
    669
  • Abstract
    An X-ray diamond film sensor with coplanar electrode geometry was fabricated and an average charge collection efficiency of 45.8% at an applied electric field of 66.7kV/cm was obtained. Scanning electron microscopy and Raman scattering studies directly demonstrated that the different collection efficiencies of the coplanar and sandwich sensors mainly resulted from the different micro-structural features between the final growth side and the substrate side of the diamond film. The energy resolution of the diamond sensor significantly decreased with the applied electric field. A good energy resolution of 1.55 % was obtained at 66.7kV/cm for the coplanar diamond film sensor
  • Keywords
    Raman spectra; X-ray detection; diamond; scanning electron microscopy; thick film sensors; Raman scattering; X-ray diamond film sensor; coplanar diamond film sensor; coplanar electrode geometry; coplanar radiation sensor; diamond sensor; scanning electron microscopy; Chemical sensors; Electrodes; Geometry; Optical films; Pulse measurements; Raman scattering; Scanning electron microscopy; Sensor phenomena and characterization; Substrates; Surface morphology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    1-4244-0160-7
  • Electronic_ISBN
    1-4244-0161-5
  • Type

    conf

  • DOI
    10.1109/ICSICT.2006.306431
  • Filename
    4098201