Title :
Studies on coplanar radiation sensor based on diamond film
Author :
Wang, Lin-jun ; Liu, Jian-Min ; Su, Qing-Feng ; Xu, Run ; Peng, Hong-Yan ; Shi, Wei-Min ; Xia, Yi-Ben
Author_Institution :
Sch. of Mater. Sci. & Eng., Shanghai Univ.
Abstract :
An X-ray diamond film sensor with coplanar electrode geometry was fabricated and an average charge collection efficiency of 45.8% at an applied electric field of 66.7kV/cm was obtained. Scanning electron microscopy and Raman scattering studies directly demonstrated that the different collection efficiencies of the coplanar and sandwich sensors mainly resulted from the different micro-structural features between the final growth side and the substrate side of the diamond film. The energy resolution of the diamond sensor significantly decreased with the applied electric field. A good energy resolution of 1.55 % was obtained at 66.7kV/cm for the coplanar diamond film sensor
Keywords :
Raman spectra; X-ray detection; diamond; scanning electron microscopy; thick film sensors; Raman scattering; X-ray diamond film sensor; coplanar diamond film sensor; coplanar electrode geometry; coplanar radiation sensor; diamond sensor; scanning electron microscopy; Chemical sensors; Electrodes; Geometry; Optical films; Pulse measurements; Raman scattering; Scanning electron microscopy; Sensor phenomena and characterization; Substrates; Surface morphology;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306431