Title :
High-sensitivity CMUT with interlayer metal architecture for medical ultrasonic systems
Author :
Teng-Chuan Cheng ; Yu-Te Liao ; Tsung-Heng Tsai
Author_Institution :
Dept. of Electr. Eng., Nat. Chung Cheng Univ., Chiayi, Taiwan
Abstract :
This paper presents an integration of the capacitive micromachined ultrasonic transducers (CMUTs) and the transimpedance amplifier in medical ultrasound systems. The proposed CMUT and the sensing circuits are both fabricated on the same chip in a 0.18μm CMOS MEMS technology. Two interlayer metal structures are proposed to improve the sensitivity. The CMUTs are designed with 2MHz cells for medical diagnosis. The conversion efficiency of the CMUTs is 4 times and 1.8 times higher than that in the published structures.
Keywords :
CMOS analogue integrated circuits; bioMEMS; biomedical transducers; biomedical ultrasonics; microfabrication; CMOS MEMS technology; capacitive micromachined ultrasonic transducers; high-sensitivity CMUT; interlayer metal architecture; medical diagnosis; medical ultrasonic systems; size 0.18 mum; Acoustics; Computer architecture; Electrodes; Metals; Noise; Resonant frequency; Thermal noise; CMUT; TIA; transducer; ultrasonic sensor;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181147
