Title :
Lumped behavioral modeling for suspended MEMS
Author :
Guangbao, Shan ; Hailong, WeiH ; Youbao, Liu
Author_Institution :
Xi´´an Inst. of Microelectron. Technol.
Abstract :
A lumped behavioral model of suspended MEMS is presented in the paper. Suspended MEMS device is decomposed into many basal components, each of which is modeled using the relative movement theory and energy method, and its parameterized model coded in Verilog-A is realized. A system-level model of tuning fork gyroscope composed of functional components models is designed and simulated in SABER. Simulation of modal frequency of the gyroscope agrees to within 1% of FEM analysis. The result also indicates that transient analysis of complicated electro-mechanical coupled system is accomplished quickly in this way
Keywords :
electromechanical effects; finite element analysis; gyroscopes; hardware description languages; micromechanical devices; transient analysis; vibrations; FEM analysis; SABER; Verilog-A; electromechanical coupled system; lumped behavioral modeling; parameterized model code; suspended MEMS device; system-level model; transient analysis; tuning fork gyroscope; Analytical models; Circuit simulation; Electrostatics; Gyroscopes; Hardware design languages; Kirchhoff´s Law; Microelectromechanical devices; Micromechanical devices; Transducers; Vibrations;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306435
