• DocumentCode
    3465757
  • Title

    Memory technologies for 50 nm and beyond

  • Author

    Kim, Kinam

  • Author_Institution
    Semicond. R&D Div., Samsung Electron. Co. Ltd, Kyunggi-Do
  • fYear
    2006
  • fDate
    Oct. 2006
  • Firstpage
    685
  • Lastpage
    688
  • Abstract
    This paper discusses whether memory technologies can continue to evolve to 50 nm node and beyond for DRAM, NAND flash and emerging new nonvolatile RAMs. First, barriers to overcome technological challenges will be addressed for those memories. Second, technological solutions against the quandaries will be discussed in detail. It is expected beyond 30 nm technology node that novel memory scheme with a 3-dimensional structure is prevailing upon both logic and memory array along with the development of new materials and new device structures
  • Keywords
    DRAM chips; NAND circuits; flash memories; nanotechnology; 30 nm; 3D structure; 50 nm; DRAM; NAND flash; logic memory array; memory technologies; nonvolatile RAM; Electrodes; FinFETs; High K dielectric materials; High-K gate dielectrics; Leakage current; Logic arrays; MIM capacitors; Metal-insulator structures; Random access memory; Tin;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    1-4244-0160-7
  • Electronic_ISBN
    1-4244-0161-5
  • Type

    conf

  • DOI
    10.1109/ICSICT.2006.306437
  • Filename
    4098207