Title :
Silicon nanocrystal memory - technology and applications
Author_Institution :
Austin Silicon Technol. Solutions, Freescale Semicond., Inc., Austin , TX
Abstract :
This paper describes the latest development in the area of silicon nanocrystal memory. Since Tiwari introduced the device concept in 1996 (Tiwari et al., 1996), much progress has been made in the areas of nanocrystal deposition, stack engineering, process integration, cell operation, and array architecture. Instead of giving a broad review of the art of semiconductor memories made with quantum dots or nanoparticles, a narrower focused update of the Freescale implementation of the silicon nanocrystal memory as an embedded flash solution is highlighted here
Keywords :
embedded systems; flash memories; integrated memory circuits; nanoparticles; quantum dots; silicon; Freescale implementation; Si; Tiwari; array architecture; cell operation; embedded flash; nanocrystal deposition; nanoparticles; process integration; quantum dots; semiconductor memories; silicon nanocrystal memory; stack engineering; Art; Electron traps; Hot carriers; Nanocrystals; Nonvolatile memory; Random access memory; Semiconductor memory; Silicon; Tunneling; Voltage;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306469
