DocumentCode
3466655
Title
Diamond Technology: An Overview - Invited Paper
Author
Abdel-Motaleb, Ibrahim M.
Author_Institution
Dept. of Electr. Eng., Northern Illinois Univ., DeKalb, IL
fYear
2006
fDate
23-26 Oct. 2006
Firstpage
853
Lastpage
856
Abstract
In this paper an overview of diamond technology and its future prospects are presented. Technological problems facing the technology and how it can be addressed will be discussed
Keywords
diamond; elemental semiconductors; micromechanical devices; MEMS; diamond films; diamond technology; technological problems; Boron; Chemical technology; Chemical vapor deposition; Micromechanical devices; Ohmic contacts; P-n junctions; Paper technology; Plasma applications; Plasma temperature; Schottky diodes;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location
Shanghai
Print_ISBN
1-4244-0160-7
Electronic_ISBN
1-4244-0161-5
Type
conf
DOI
10.1109/ICSICT.2006.306528
Filename
4098255
Link To Document