DocumentCode
3466853
Title
Development of new micro gas preconcentrator using novel electroless gold plating process
Author
Kuo, C.-Y. ; Chen, P.-S. ; Chiu, K.-J. ; Lu, C.-J. ; Tian, W.-C.
Author_Institution
Nat. Taiwan Univ., Taipei, Taiwan
fYear
2015
fDate
21-25 June 2015
Firstpage
1456
Lastpage
1459
Abstract
This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.
Keywords
chromatography; electroplating; gold; metallic thin films; porosity; acetone; benzene; electrical power; electroless gold plating; gold thin film; m-xylene; microgas chromatograph; microgas preconcentrator; porosity; thin film heater; toluene; volatile organic compounds; Compounds; Films; Gold; Plating; Resistance heating; Surface treatment; electroless gold plating; micro gas chromatography (μGC); micro gas preconcentrator (μPCT);
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location
Anchorage, AK
Type
conf
DOI
10.1109/TRANSDUCERS.2015.7181209
Filename
7181209
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