• DocumentCode
    3466853
  • Title

    Development of new micro gas preconcentrator using novel electroless gold plating process

  • Author

    Kuo, C.-Y. ; Chen, P.-S. ; Chiu, K.-J. ; Lu, C.-J. ; Tian, W.-C.

  • Author_Institution
    Nat. Taiwan Univ., Taipei, Taiwan
  • fYear
    2015
  • fDate
    21-25 June 2015
  • Firstpage
    1456
  • Lastpage
    1459
  • Abstract
    This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold thin film utilized for heating with a high porosity is fabricated within the surface of the μPCT channel. The μPCT can be heated to >300°C repeatedly by applying a constant electrical power. A commercial Tenax TA was used as an adsorbent. Four volatile organic compounds (VOCs), acetone, benzene, toluene and m-xylene, are successfully collected and concentrated with the narrow peak width at half height (PWHH) (1.92 to 3.88 s). Compared to our previous results, this study presents up to approximately 49% narrower PWHH and approximately six times faster heating.
  • Keywords
    chromatography; electroplating; gold; metallic thin films; porosity; acetone; benzene; electrical power; electroless gold plating; gold thin film; m-xylene; microgas chromatograph; microgas preconcentrator; porosity; thin film heater; toluene; volatile organic compounds; Compounds; Films; Gold; Plating; Resistance heating; Surface treatment; electroless gold plating; micro gas chromatography (μGC); micro gas preconcentrator (μPCT);
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
  • Conference_Location
    Anchorage, AK
  • Type

    conf

  • DOI
    10.1109/TRANSDUCERS.2015.7181209
  • Filename
    7181209