DocumentCode :
3466929
Title :
MEMS & Sensors
Author :
Ayazi, Farrokh ; Hagleitner, Christoph
Author_Institution :
Georgia Institute of Technology, Atlanta, GA
fYear :
2008
fDate :
3-7 Feb. 2008
Firstpage :
574
Lastpage :
575
Keywords :
Accelerometers; CMOS process; CMOS technology; Filters; Gyroscopes; Integrated circuit noise; Micromechanical devices; Paper technology; Switches; Temperature sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Circuits Conference, 2008. ISSCC 2008. Digest of Technical Papers. IEEE International
Conference_Location :
San Francisco, CA
Print_ISBN :
978-1-4244-2010-0
Electronic_ISBN :
978-1-4244-2011-7
Type :
conf
DOI :
10.1109/ISSCC.2008.4523313
Filename :
4523313
Link To Document :
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