Title :
A New ZnO Film Photodetector Fabricated on Diamond Substrate
Author :
Liu, Jian-Min ; Xia, Yi-Ben ; Wang, Lin-jun ; Zhao, Ping ; Su, Qing-Feng ; Shi, Wei-Min
Author_Institution :
Sch. of Mater. Sci. & Eng., Shanghai Univ.
Abstract :
Highly c-axis oriented ZnO film was successfully deposited on the nucleation side of free-standing diamond film by RF reactive magnetron sputtering. I-V characteristics of ZnO film photodetector fabricated on diamond substrate were studied under ultraviolet light illumination and a significant photoresponsivity was observed. The dark-current and the photocurrent of the ZnO photodetector operated at 10V are 8.2 nA and 134.8 nA, respectively
Keywords :
II-VI semiconductors; diamond; photoconductivity; photodetectors; sputter deposition; substrates; thin films; wide band gap semiconductors; zinc compounds; 10 V; 134.8 nA; 8.2 nA; I-V characteristics; RF reactive magnetron sputtering; ZnO; ZnO film photodetector; dark current; diamond substrate; free-standing diamond film; photocurrent; photoresponsivity; ultraviolet light illumination; Photodetectors; Raman scattering; Resistance heating; Scanning electron microscopy; Semiconductor films; Sputtering; Substrates; Temperature; Thermal conductivity; Zinc oxide;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306604
