DocumentCode
3467994
Title
Laser ablation forward deposition of metal lines for electrical interconnect repair
Author
Tatah, Karim ; Fukumoto, Akira ; Thompson, Carl V.
Author_Institution
Panasonic Technol. Inc., Boston, MA, USA
fYear
1995
fDate
2-4 Oct 1995
Firstpage
176
Lastpage
178
Abstract
Flat-panel display interconnect repair requires an open air (vacuum-system-free), environmentally friendly, dry process with a minimum number of steps. The Laser Ablation Forward Deposition (LAFD) approach described in this paper offers such advantages with the potential for low cost. The Laser Ablation Forward Deposition technique transfers metallic film from a glass support to a nearby substrate by laser ablation. This technique can deposit a wide range of metals
Keywords
flat panel displays; maintenance engineering; metallisation; pulsed laser deposition; air environment; dry process; electrical interconnect repair; flat-panel display; laser ablation forward deposition; metal lines; Chemical lasers; Coatings; Costs; Displays; Gas lasers; Glass; Laser ablation; Laser beams; Optical pulses; Pulsed laser deposition; Silver; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Manufacturing Technology Symposium, 1995. 'Manufacturing Technologies - Present and Future', Seventeenth IEEE/CPMT International
Conference_Location
Austin, TX
Print_ISBN
0-7803-2996-1
Type
conf
DOI
10.1109/IEMT.1995.526111
Filename
526111
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