• DocumentCode
    3467994
  • Title

    Laser ablation forward deposition of metal lines for electrical interconnect repair

  • Author

    Tatah, Karim ; Fukumoto, Akira ; Thompson, Carl V.

  • Author_Institution
    Panasonic Technol. Inc., Boston, MA, USA
  • fYear
    1995
  • fDate
    2-4 Oct 1995
  • Firstpage
    176
  • Lastpage
    178
  • Abstract
    Flat-panel display interconnect repair requires an open air (vacuum-system-free), environmentally friendly, dry process with a minimum number of steps. The Laser Ablation Forward Deposition (LAFD) approach described in this paper offers such advantages with the potential for low cost. The Laser Ablation Forward Deposition technique transfers metallic film from a glass support to a nearby substrate by laser ablation. This technique can deposit a wide range of metals
  • Keywords
    flat panel displays; maintenance engineering; metallisation; pulsed laser deposition; air environment; dry process; electrical interconnect repair; flat-panel display; laser ablation forward deposition; metal lines; Chemical lasers; Coatings; Costs; Displays; Gas lasers; Glass; Laser ablation; Laser beams; Optical pulses; Pulsed laser deposition; Silver; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Manufacturing Technology Symposium, 1995. 'Manufacturing Technologies - Present and Future', Seventeenth IEEE/CPMT International
  • Conference_Location
    Austin, TX
  • Print_ISBN
    0-7803-2996-1
  • Type

    conf

  • DOI
    10.1109/IEMT.1995.526111
  • Filename
    526111