DocumentCode :
3468205
Title :
Designing response surface model based Run by Run controllers: a new approach
Author :
Baras, John S. ; Patel, Nital S.
Author_Institution :
Dept. of Electr. Eng., Maryland Univ., College Park, MD, USA
fYear :
1995
fDate :
2-4 Oct 1995
Firstpage :
210
Lastpage :
217
Abstract :
This paper presents a framework for carrying out robust Run by Run (RbR) control via a set-theoretic approach. In particular the RbR controller developed tries to minimize the worst case performance of the plant. This gives us a methodology to handle uncertainty. An interesting consequence of using the set valued approach is that now we can relax the assumptions made on the statistics of the noise. Hence, we can also deal with non-Gaussian and correlated noise. We provide results comparing the performance of the controller to a recursive least squares based controller
Keywords :
control system synthesis; controllers; process control; robust control; set theory; correlated noise; noise statistics; nonGaussian noise; recursive least squares; response surface model; robust control; run by run controllers; semiconductor industry; set theory; uncertainty; worst case performance; Automatic control; Control charts; Educational institutions; Least squares methods; Process control; Response surface methodology; Robust control; Semiconductor device noise; Statistics; Systems engineering and theory; Uncertainty;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electronics Manufacturing Technology Symposium, 1995. 'Manufacturing Technologies - Present and Future', Seventeenth IEEE/CPMT International
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2996-1
Type :
conf
DOI :
10.1109/IEMT.1995.526117
Filename :
526117
Link To Document :
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