• DocumentCode
    3468205
  • Title

    Designing response surface model based Run by Run controllers: a new approach

  • Author

    Baras, John S. ; Patel, Nital S.

  • Author_Institution
    Dept. of Electr. Eng., Maryland Univ., College Park, MD, USA
  • fYear
    1995
  • fDate
    2-4 Oct 1995
  • Firstpage
    210
  • Lastpage
    217
  • Abstract
    This paper presents a framework for carrying out robust Run by Run (RbR) control via a set-theoretic approach. In particular the RbR controller developed tries to minimize the worst case performance of the plant. This gives us a methodology to handle uncertainty. An interesting consequence of using the set valued approach is that now we can relax the assumptions made on the statistics of the noise. Hence, we can also deal with non-Gaussian and correlated noise. We provide results comparing the performance of the controller to a recursive least squares based controller
  • Keywords
    control system synthesis; controllers; process control; robust control; set theory; correlated noise; noise statistics; nonGaussian noise; recursive least squares; response surface model; robust control; run by run controllers; semiconductor industry; set theory; uncertainty; worst case performance; Automatic control; Control charts; Educational institutions; Least squares methods; Process control; Response surface methodology; Robust control; Semiconductor device noise; Statistics; Systems engineering and theory; Uncertainty;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronics Manufacturing Technology Symposium, 1995. 'Manufacturing Technologies - Present and Future', Seventeenth IEEE/CPMT International
  • Conference_Location
    Austin, TX
  • Print_ISBN
    0-7803-2996-1
  • Type

    conf

  • DOI
    10.1109/IEMT.1995.526117
  • Filename
    526117