DocumentCode
3468205
Title
Designing response surface model based Run by Run controllers: a new approach
Author
Baras, John S. ; Patel, Nital S.
Author_Institution
Dept. of Electr. Eng., Maryland Univ., College Park, MD, USA
fYear
1995
fDate
2-4 Oct 1995
Firstpage
210
Lastpage
217
Abstract
This paper presents a framework for carrying out robust Run by Run (RbR) control via a set-theoretic approach. In particular the RbR controller developed tries to minimize the worst case performance of the plant. This gives us a methodology to handle uncertainty. An interesting consequence of using the set valued approach is that now we can relax the assumptions made on the statistics of the noise. Hence, we can also deal with non-Gaussian and correlated noise. We provide results comparing the performance of the controller to a recursive least squares based controller
Keywords
control system synthesis; controllers; process control; robust control; set theory; correlated noise; noise statistics; nonGaussian noise; recursive least squares; response surface model; robust control; run by run controllers; semiconductor industry; set theory; uncertainty; worst case performance; Automatic control; Control charts; Educational institutions; Least squares methods; Process control; Response surface methodology; Robust control; Semiconductor device noise; Statistics; Systems engineering and theory; Uncertainty;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Manufacturing Technology Symposium, 1995. 'Manufacturing Technologies - Present and Future', Seventeenth IEEE/CPMT International
Conference_Location
Austin, TX
Print_ISBN
0-7803-2996-1
Type
conf
DOI
10.1109/IEMT.1995.526117
Filename
526117
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