DocumentCode :
3468285
Title :
Fabrication of a thin-film thermal converter with resistive sensing
Author :
Di Lillo, L. ; Malatto, L. ; Giménez, G. ; Mangano, E. ; Fraigi, L. ; Laiz, H.
Author_Institution :
Inst. Nac. de Tecnol. Ind. (INTI), San Martin, Argentina
fYear :
2010
fDate :
13-18 June 2010
Firstpage :
163
Lastpage :
164
Abstract :
A new thin-film thermal converter was designed and constructed. It senses the temperature rise of the heater using resistors made of vanadium oxide (VO2). This paper presents details of the fabrication process and materials selection.
Keywords :
AC-DC power convertors; resistors; temperature sensors; thermocouples; thin film circuits; vanadium compounds; VO2; heater; material selection; resistive sensing; resistors; thin-film thermal converter fabrication process; Biomembranes; Bridge circuits; Conductivity; Fabrication; Resistors; Silicon; Temperature sensors; Thermal resistance; Transistors; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Precision Electromagnetic Measurements (CPEM), 2010 Conference on
Conference_Location :
Daejeon
Print_ISBN :
978-1-4244-6795-2
Type :
conf
DOI :
10.1109/CPEM.2010.5543788
Filename :
5543788
Link To Document :
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