Title :
Fabrication of a thin-film thermal converter with resistive sensing
Author :
Di Lillo, L. ; Malatto, L. ; Giménez, G. ; Mangano, E. ; Fraigi, L. ; Laiz, H.
Author_Institution :
Inst. Nac. de Tecnol. Ind. (INTI), San Martin, Argentina
Abstract :
A new thin-film thermal converter was designed and constructed. It senses the temperature rise of the heater using resistors made of vanadium oxide (VO2). This paper presents details of the fabrication process and materials selection.
Keywords :
AC-DC power convertors; resistors; temperature sensors; thermocouples; thin film circuits; vanadium compounds; VO2; heater; material selection; resistive sensing; resistors; thin-film thermal converter fabrication process; Biomembranes; Bridge circuits; Conductivity; Fabrication; Resistors; Silicon; Temperature sensors; Thermal resistance; Transistors; Voltage;
Conference_Titel :
Precision Electromagnetic Measurements (CPEM), 2010 Conference on
Conference_Location :
Daejeon
Print_ISBN :
978-1-4244-6795-2
DOI :
10.1109/CPEM.2010.5543788