DocumentCode
3469236
Title
Modeling the MOSFETs´ Gate Current with the Drawn Dimensions
Author
Yeh, Chun-Chia ; Neih, Chun-Feng ; Chen, Yen-Yu ; Gong, Jeng
Author_Institution
Inst. of Electron. Eng., Nat. Tsing-Hua Univ., Hsinchu
fYear
2006
fDate
23-26 Oct. 2006
Firstpage
1287
Lastpage
1289
Abstract
A mathematical method of modeling the gate leakage current IG is presented in this work. Both the shallow trench isolation effect and the source drain extension effect on IG are included. With suitably chosen transistor dimensions the parameter extraction can be performed with the devices´ drawn size, the effective device length and width is not necessary in this model. The extracted parameters were used to predict IG of devices with other dimensions. The error between calculated results and measured results is about 3%
Keywords
MOSFET; leakage currents; semiconductor device models; MOSFET; drawn dimensions; gate leakage current; shallow trench isolation; source drain extension effect; Dielectric devices; Dielectric measurements; Integrated circuit modeling; Lead compounds; Leakage current; MOSFETs; Mathematical model; Parameter extraction; Semiconductor devices; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location
Shanghai
Print_ISBN
1-4244-0160-7
Electronic_ISBN
1-4244-0161-5
Type
conf
DOI
10.1109/ICSICT.2006.306116
Filename
4098385
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