Title :
CMOS MEMS resonator oscillator with an on-chip boost DC/DC converter
Author :
Tseng, S.H. ; Hsieh, Y.T. ; Lin, C.C. ; Tsai, H.H. ; Juang, Y.Z.
Author_Institution :
Nat. Chip Implementation Center, Nat. Appl. Res. Labs., Hsinchu, Taiwan
Abstract :
This paper presents a CMOS MEMS resonator oscillator with an on-chip boost DC/DC converter, based on an integrated Bipolar-CMOS-DMOS MEMS process. The maximum boost DC voltage can be up to 60 V, which is used to provide the DC bias voltage on the MEMS resonator. The resonator oscillator is achieved using a positive feedback loop to compensate the closed-loop gain/phase for the oscillation condition. The resonator oscillator has a measured oscillation frequency of 35.2 kHz with a 30-V DC bias voltage. The output oscillation frequency can be adjusted to 32.76 kHz when the on-chip boost DC bias voltage on the resonator is increased to 51.5 V under 1 atm.
Keywords :
CMOS analogue integrated circuits; DC-DC power convertors; bipolar analogue integrated circuits; feedback; micromechanical resonators; oscillators; CMOS MEMS resonator oscillator; boost DC voltage; closed-loop gain-phase; frequency 32.76 kHz; frequency 35.2 kHz; integrated bipolar-CMOS-DMOS MEMS process; on-chip boost DC bias voltage; on-chip boost DC-DC converter; oscillation frequency; positive feedback loop; pressure 1 atm; voltage 30 V; voltage 51.5 V; CMOS integrated circuits; Frequency measurement; Micromechanical devices; Microstructure; Oscillators; Resonant frequency; Voltage measurement; CMOS MEMS; DC/DC converter; oscillator; resonator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181342
