Proactive control of engineering operations and lot loadings of product-mix and re-entrant in Q-time constraints processes

This paper presented solutions respond to three issues of scheduling of semiconductor manufacturing. As the first we introduced a computer software with optimal logic and UI chart. We are ready to evaluate the performance in an actual Fab. In the second, optimal scheduling of fab operations and re-scheduling algorithm are discussed. Dynamic-CKB rule can reduce 931 rework lots during 6 days and 8782 hours in total waiting time compared with No-CKB. As the third, scheduling of product-mix and reentrant-mix lots is discussed for the throughput maximization and the cycle time minimization. OPC-REFS rule can solve the multipurpose problem for the throughput maximization and the cycle time minimization though general multi-purpose problem cannot be solve the problem in optimal. OPC-REFS rule which we proposed achieves the best performance regardless differences of recipes and production volumes among product-mix or flows.