• DocumentCode
    3469842
  • Title

    Wet bench chemical usage efficiency & tool productivity

  • Author

    Tan Sok Theng ; Jindal, Shikha ; Su, Shih-Tang

  • Author_Institution
    Syst. on Silicon Mfg Co. Pte.Ltd., Singapore, Singapore
  • fYear
    2013
  • fDate
    6-6 Sept. 2013
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    ·Wet bench chemical usage efficiency & productivity performance depends on how the critical bath lifetime & lifecount* is being optimized. (* Maximum batch count before next chemical change) ·Conventional method uses software programs for lot list data to determine the tool efficiency which is tedious & complex. ·This paper introduces a new method of tracking & measuring the chemical usage efficiency & productivity performance in a simple & graphical way.
  • Keywords
    production engineering computing; production equipment; productivity; chemical change; maximum batch count; productivity performance; software programs; tool efficiency; tool productivity; wet bench chemical usage efficiency; Abstracts; Bismuth; Chemicals; Productivity; Runtime; Productivity; chemical usage; lifecount; lifetime; wet bench;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    e-Manufacturing & Design Collaboration Symposium (eMDC), 2013
  • Conference_Location
    Hsinchu
  • Type

    conf

  • DOI
    10.1109/eMDC.2013.6756051
  • Filename
    6756051
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3469842