Efficiency of risk reduction by installation of seismic isolation system for vertical furnace

As an efficient measure against the risk of the damage of breakdown of semiconductor manufacturing equipment in particular vertical furnace, seismic isolation system for vertical furnaces was developed. By shaking table tests, it was experimentally confirmed seismic acceleration at vertical furnace was reduced efficiently and the target performance of the seismic isolation system was achieved. Additionally, simulation model was built and analytical simulation of the performance of the seismic isolation system was carried out.