Title :
Investigation of SAWs Propagating on the Nano-porous Film
Author :
Bai, Mao-Sen ; Xiao, Xia ; Li, Zhi-Guo ; Yao, Su-ying ; Ruan, Gang
Author_Institution :
Sch. of Electron. & Inf. Eng., Tianjin Univ.
Abstract :
This paper established a new layered model to calculate the theoretical dispersion curve of SAWs propagating on the periodic porous SiO2 film on the Si substrate. In this model the periodic nanoporous SiO2 film is treated as transversal isotropic structure. Based on this model the properties of SAWs propagating on the surface of periodic porous SiO2 film in the directions of Si [110] and Si [100] are studied. The investigation on the characteristics of SAWs propagating on the periodic nanoporous film with different porosity, density as well as thickness is performed
Keywords :
acoustic wave propagation; dispersion (wave); nanoporous materials; semiconductor thin films; silicon; silicon compounds; surface acoustic waves; Si(100); Si(110); SiO2; dispersion curve; nanoporous film; surface acoustic waves; transversal isotropic structure; Acoustic measurements; Acoustic waves; Dielectric materials; Periodic structures; Sawing machines; Semiconductor films; Substrates; Surface acoustic waves; Surface fitting; Very large scale integration;
Conference_Titel :
Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0160-7
Electronic_ISBN :
1-4244-0161-5
DOI :
10.1109/ICSICT.2006.306235
