Efficient nonlinear simulink models of MEMS gyroscopes generated with a novel model order reduction method

This paper reports a novel model order reduction approach for creating fast-running, nonlinear, multiphysics models of MEMS sensors for Simulink. The accuracy of this new approach is validated for a state-of-the-art three-axis capacitive gyroscope from Murata Electronics (Figure 1). A nonlinear reduced-order model (ROM) of the gyroscope that preserves the electrostatic softening effect and Coriolis sensing is generated. Comparisons to measured data showed that the generated ROM accurately predicts nonlinear behavior while preserving fast simulation speed.