DocumentCode
3471131
Title
DC voltage standard based on square wave excitation of a micromechanical capacitive sensor
Author
Kaasalainen, J. ; Manninen, A.
Author_Institution
Centre for Metrol. & Accreditation (MIKES), Espoo, Finland
fYear
2010
fDate
13-18 June 2010
Firstpage
209
Lastpage
210
Abstract
Long term stability of a DC voltage standard based on a MEMS plate capacitor was investigated. Square wave voltage excitation was used to cancel the effect of slow charging appearing in the dielectric layers and capacitor plate surfaces of the MEMS capacitor. The key properties of a MEMS capacitor and the operational principle of the apparatus that implements the voltage standard are explained.
Keywords
capacitive sensors; capacitors; measurement standards; microsensors; stability; voltage measurement; DC voltage standard long term stability; MEMS plate capacitor; capacitor plate surfaces; dielectric layers; micromechanical capacitive sensor; slow charging effect cancellation; square wave voltage excitation; Bridge circuits; Capacitance measurement; Capacitive sensors; Capacitors; Electrostatic measurements; Micromechanical devices; Pi control; Pulse amplifiers; Stability; Voltage control;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements (CPEM), 2010 Conference on
Conference_Location
Daejeon
Print_ISBN
978-1-4244-6795-2
Type
conf
DOI
10.1109/CPEM.2010.5543949
Filename
5543949
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