DocumentCode
3471166
Title
Point contact transducer of waveguiding structure for high-frequency operation
Author
Yamada, Ken ; Khuri-Yakub, Butrus T.
Author_Institution
Dept. of Electr. Commun., Tohoku Univ., Sendai, Japan
Volume
2
fYear
1995
fDate
7-10 Nov 1995
Firstpage
955
Abstract
Time-of-flight measurements with point-like contact transducers have successfully been applied for the detection of anisotropy, and for in situ measurements of film thickness and temperature. This paper presents a new type of Hertzian-contact transducer of waveguiding structure operating in the MHz range. The transducer is composed of a fused quartz tube and a radially-polarized annular piezoelectric element bonded to one of its ends. The edge-bonded shear-wave transducer effectively excites a surface wave on the interior surface of the tube. A small bullet pin made of quartz is inserted and fixed on the other end of the tube to make a point contact and transmit the wave energy to a specimen to be inspected. Using a pair of these transducers, we have succeeded in the excitation and detection of surface acoustic waves as well as Lamb waves in the 3 MHz frequency range
Keywords
piezoelectric transducers; point contacts; surface acoustic wave transducers; surface acoustic wave waveguides; ultrasonic dispersion; ultrasonic measurement; ultrasonic transducers; 3.36 MHz; Hertzian-contact transducer; Lamb waves; MHz range; SiO2; anisotropy detection; edge-bonded shear-wave transducer; film temperature measurement; film thickness measurement; fused quartz tube; high-frequency operation; in situ measurements; phase velocity dispersion curves; point contact transducer; quartz bullet pin; radially-polarized annular piezoelectric element; surface acoustic wave detection; surface wave excitation; time-of-flight measurements; waveguiding structure; Acoustic signal detection; Acoustic transducers; Anisotropic magnetoresistance; Bonding; Piezoelectric films; Piezoelectric transducers; Surface acoustic waves; Surface waves; Temperature; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1995. Proceedings., 1995 IEEE
Conference_Location
Seattle, WA
ISSN
1051-0117
Print_ISBN
0-7803-2940-6
Type
conf
DOI
10.1109/ULTSYM.1995.495722
Filename
495722
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