DocumentCode
3474453
Title
Microengineered Silicon Pressure Sensors
Author
Burns, D.W. ; DuPuis, P.
fYear
1991
fDate
16-18 April 1991
Firstpage
123
Keywords
Aerospace industry; Application software; Mechanical sensors; Packaging; Predictive models; Resistors; Sensor systems and applications; Silicon; Temperature sensors; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Electro International, 1991
Conference_Location
New York, NY, USA
Type
conf
DOI
10.1109/ELECTR.1991.718185
Filename
718185
Link To Document