An efficient method MEGCR for solving systems with multiple right-hand sides in 3-D parasitic inductance extraction

With the development of the VLSI circuits, the feature size has been decreased to the deep sub-micron level, and the working frequency has reached to 3GHz. In order to assure the correctness of the IC design with high performance, the parasitic interconnect inductance and resistance should he calculated quickly and accurately. In this paper, the multipole method with modified non-uniform cube partitioning is applied to the matrix-vector products in the GCR iteration Based on the EGCR (Extended Generalized Conjugate Residual) method, this paper proposes a MEGCR method for solving systems with multiple right-hand sides (multiple RHS). Numerical results show that it runs faster than FastHenry tem?? times with comparable accuracy.