Title :
Blowing Polysilicon Fuses: What Conditions are Best?
Author :
Li, Yuanjing ; Tang, Andrew
Author_Institution :
Analog Devices Inc., Sunnyvale, CA
fDate :
Oct. 16 2006-Sept. 19 2006
Abstract :
A study has been conducted to understand polysilicon fuse blow mechanisms and determine optimized blow conditions. The correlation of optical microscope images, cross section SEM (scanning electron microscope) images, and electrical waveforms of fuses blown at different voltages revealed two different blow mechanisms. Furthermore, SEM images of fuses blown using different pulse widths showed the physical changes of fuses during the fuse blow process
Keywords :
electric fuses; blow mechanisms; cross section SEM; electrical waveforms; fuse blow process; optical microscope images; polysilicon fuses; scanning electron microscope images; Current measurement; Electron optics; Fuses; Logic circuits; Optical microscopy; Oscilloscopes; Scanning electron microscopy; Stimulated emission; Thermal stresses; Voltage;
Conference_Titel :
Integrated Reliability Workshop Final Report, 2006 IEEE International
Conference_Location :
South Lake Tahoe, CA
Print_ISBN :
1-4244-0296-4
Electronic_ISBN :
1930-8841
DOI :
10.1109/IRWS.2006.305244
