Sub-micron position sensor with a fiber-optic interferometer

Author

Nagaike, Yasunari ; Lai, Guanming ; Wu, Yuying ; Ikeda, Hiroaki

Author_Institution

Shizuoka Univ., Hamamatsu, Japan

Volume

3

fYear

1999

fDate

1999

Firstpage

1751

Abstract

The wide applications of piezoelectric transducers in position server systems make the measurement and control of sub-micron displacement more and more important these days. In this paper, the authors propose a novel system based on a fiber optic interferometer and digital signal processing techniques. The size of the sensor is reduced by the fiber optics and the precision of measurement is assured by the digital analysis of the linear interference fringes. In their experiments of evaluating two types of piezoelectric transducers, a sensitivity of 5 nanometers has been realized

Keywords

fibre optic sensors; interferometry; piezoelectric transducers; position control; position measurement; signal processing; applications; digital signal processing techniques; fiber-optic interferometer; linear interference fringes; measurement sensitivity; piezoelectric transducers; position server systems; sub-micron displacement; sub-micron position sensor; Control systems; Digital signal processing; Displacement control; Displacement measurement; Optical fiber sensors; Optical fibers; Optical interferometry; Optical sensors; Piezoelectric transducers; Position measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Industry Applications Conference, 1999. Thirty-Fourth IAS Annual Meeting. Conference Record of the 1999 IEEE

Conference_Location

Phoenix, AZ

ISSN

0197-2618

Print_ISBN

0-7803-5589-X

Type

conf

DOI

10.1109/IAS.1999.805976

Filename

805976