Dual-phase 18V 280μA charge pump with active switches and passive level shifter for low-voltage high-density capacitors

This paper describes the implementation of a high-output current charge pump with passive level shifters, aiming the reliable driving of internal active switches. The technique described here enables advantageous use of high-density integrated Metal-Insulator-Metal (MIM) capacitors with low breakdown voltage, and active switches (MOS transistors). This enables to obtain high power density integration. In addition, capacitor area optimization and feedback control allowing generate constant output voltage are discussed. The 10MHz charge pump was integrated in 0.13μm CMOS process. Thanks to extra epitaxial trench isolation, 18V output voltage with the output current ranging up to 280μA is reached. The target application is the quadrature/frequency compensation of a 3-axis vibratory MEMS Gyroscope.