DocumentCode
347803
Title
Achieving fast motions in semiconductor manufacturing machinery
Author
Meckl, Peter H. ; Umemoto, Kazunobu
Author_Institution
Sch. of Mech. Eng., Purdue Univ., West Lafayette, IN, USA
Volume
1
fYear
1999
fDate
1999
Firstpage
725
Abstract
Many manufacturing devices must execute motions as quickly as possible to achieve profitable high-volume production. This paper develops shaped torque inputs that minimize move time while avoiding overshoot and oscillation. These inputs are applied to an actual semiconductor manufacturing machine, utilizing both feedforward and feedback strategies for minimizing the degree of vibration generated during fast motions
Keywords
feedback; feedforward; machine tools; motion control; semiconductor device manufacture; three-term control; vibration control; PID control; feedback; feedforward; high-volume production; motion control; semiconductor manufacturing machinery; shaped torque inputs; vibration control; Fasteners; Feedback control; Machinery; Mechanical engineering; Motion control; Production; Semiconductor device manufacture; Torque; Vibrations; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Control Applications, 1999. Proceedings of the 1999 IEEE International Conference on
Conference_Location
Kohala Coast, HI
Print_ISBN
0-7803-5446-X
Type
conf
DOI
10.1109/CCA.1999.806741
Filename
806741
Link To Document