Title :
Mechanisms of elemental contamination in ion implantation equipment
Author :
Wauk, Michael T. ; Murrell, A. ; Wagner, D. ; Edwards, P.
Author_Institution :
Implant Div., Appl. Mater., Horsham, UK
Abstract :
This paper will survey 10 different mechanisms for producing elemental implanted and surface contaminants in implantation tools, and outline the tool design methods for avoiding the contaminants. These considerations also help us to improve the techniques used for surface analysis
Keywords :
ion implantation; surface contamination; elemental contamination; ion implantation equipment; surface analysis; tool design; Artificial intelligence; Electrodes; Implants; Interference; Ion implantation; Iron; Pollution measurement; Sputtering; Surface contamination; Wheels;
Conference_Titel :
Ion Implantation Technology. Proceedings of the 11th International Conference on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-3289-X
DOI :
10.1109/IIT.1996.586146
