Simulation of deflection and stress for MEMS pressure sensor based on graphene

In this paper, we conduct simulation of MEMS pressure sensors based on graphene membrane by using COMSOL finite element software and comparatively study the deflection and stress distribution of rectangular and circular vacuum cavities applied by a pressure. we also analyze the change rule of graphene membrane stress and maximum deflection distance for the two kinds of pressure sensor with different vacuum cavities. Simulation results show that only several layers graphene membrane can deflect greatly under a large pressure and the deflection changes linearly. Finally, we calculate the maximum stress and it is found to meet membrane strength requirement. These advantages predict that graphene has a huge potential for MEMS pressure sensors.