Title :
Micro-sensor arrays for calibration, control, and monitoring of semiconductor manufacturing processes
Author :
Fisher, Darin ; Freed, Mason ; Spanos, Costas ; Poolla, Kameshwar
Author_Institution :
Dept. of Mech. Eng., California Univ., Berkeley, CA, USA
Abstract :
In this paper we first motivate the use of autonomous micro-sensor arrays for use in semiconductor manufacturing. Following this, we discuss three critical issues that must be addressed in order to realize our goal of building these micro-sensor arrays. We then describe our on-going development efforts of fabricating spatially resolved etch-rate and temperature sensors
Keywords :
arrays; calibration; etching; integrated circuit manufacture; integrated circuit measurement; microsensors; process monitoring; temperature sensors; calibration; control; micro-sensor arrays; monitoring; semiconductor manufacturing processes; spatially resolved etch-rate sensors; spatially resolved temperature sensors; Calibration; Etching; Manufacturing processes; Mechanical engineering; Metrology; Monitoring; Production; Sensor arrays; Spatial resolution; Throughput;
Conference_Titel :
Control Applications, 1999. Proceedings of the 1999 IEEE International Conference on
Conference_Location :
Kohala Coast, HI
Print_ISBN :
0-7803-5446-X
DOI :
10.1109/CCA.1999.807761
