Title :
High Dielectric Films Prepared By The Nanotransfer Method
Author :
Ichiki, Masaaki ; Maeda, Ryutaro
Author_Institution :
Adv. Manuf. Res. Inst., Ibaraki
fDate :
Jan. 16 2007-Yearly 18 2007
Abstract :
Fabrication technologies of high-density capacitor onto polymer substrate is shown using nanotransfer method. The formed PZT film capacitor has a dielectric constant of around 1000 that is over 10 times higher than that of previous one.
Keywords :
nanoelectronics; piezoelectric devices; piezoelectric thin films; thin film capacitors; PZT film capacitor; high dielectric films; high-density capacitor; nanotransfer method; polymer substrate; Capacitors; Dielectric constant; Dielectric films; Dielectric substrates; Electrodes; Fabrication; Ferroelectric films; Heat treatment; Polymer films; Semiconductor films; Capacitor; Embedded substrate; High-density; Nanotransfer; PZT;
Conference_Titel :
Polymers and Adhesives in Microelectronics and Photonics, 2007. Polytronic 2007. 6th International Conference on
Conference_Location :
Odaiba, Tokyo
Print_ISBN :
978-1-4244-1186-3
Electronic_ISBN :
978-1-4244-1186-3
DOI :
10.1109/POLYTR.2007.4339137
