Title :
Micromachined rectangular coaxial line and cavity resonator for 77 GHz applications using SU8 photoresist
Author :
Ke, Maolong ; Wang, Yi ; Jiang, Kyle ; Lancaster, Michael J.
Author_Institution :
Sch. of Eng., Univ. of Birmingham, Birmingham
Abstract :
Thick SU8 photoresist technique is used to fabricate two millimetre-wave components. Firstly, an air-filled rectangular coaxial line operating from 55 to 87 GHz is fabricated and tested, and an insertion loss of 0.8 dB and return loss of better than -15 dB was obtained. The overall measured responses agree well with full-wave simulation results. Secondly, a cavity resonator operating at 77 GHz is reported. An unloaded Q value of 569 was obtained, which is, to our knowledge, one of the best reported so far in a similar structure.
Keywords :
cavity resonators; coaxial cables; millimetre wave devices; photoresistors; SU8 photoresist technique; air-filled rectangular coaxial line; cavity resonator; frequency 55 GHz to 87 GHz; loss 0.8 dB; micromachined rectangular coaxial line; millimetre-wave components; Cavity resonators; Coaxial components; Dielectric losses; Displays; Fabrication; Frequency; Gold; Insertion loss; Passband; Resists;
Conference_Titel :
Microwave Conference, 2008. APMC 2008. Asia-Pacific
Conference_Location :
Macau
Print_ISBN :
978-1-4244-2641-6
Electronic_ISBN :
978-1-4244-2642-3
DOI :
10.1109/APMC.2008.4957973
