DocumentCode
3479549
Title
Optimal control of ion beam dynamics
Author
Viviani, G.L. ; Falco, M.
Author_Institution
Varian Ion Implant Syst., Gloucester, MA, USA
fYear
1996
fDate
16-21 Jun 1996
Firstpage
241
Lastpage
244
Abstract
Beam tuning is a problem in which an operating point of a state vector must be determined such that a pregiven objective is optimized. The most reliable approaches involve application of control consistent with the requisite physics of implantation. This paper outlines the salient features of reliable and repeatable algorithms dependent upon physical phenomena and then describes how these characteristics are applied to develop a commercial beam tuning product. Initial results are also described
Keywords
beam handling techniques; integrated circuit manufacture; ion beams; ion implantation; optimal control; particle beam dynamics; process control; N-state memory device; beam tuning; implantation physics; ion beam dynamics; ion implantation; operating point; optimal control; reliable repeatable algorithms; state vector; Automatic control; Implants; Ion beams; Mathematical model; Mathematics; Optimal control; Physics; Robust control; Semiconductor device reliability; State-space methods;
fLanguage
English
Publisher
ieee
Conference_Titel
Ion Implantation Technology. Proceedings of the 11th International Conference on
Conference_Location
Austin, TX
Print_ISBN
0-7803-3289-X
Type
conf
DOI
10.1109/IIT.1996.586208
Filename
586208
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