Title :
A CMOS fully-integrated low-voltage vibratory microgyroscope
Author :
Liang, Yung C. ; Zhao, Tao ; Xu, Yong P. ; Boh, Siau S.
Author_Institution :
Electr. & Comput. Eng. Dept., Nat. Univ. of Singapore, Singapore
Abstract :
A low-voltage bulk micromachined microgyroscope is presented in this paper. An ASIC (application specific integrated circuit) is integrated on the same silicon die to minimize the parasitic effect and to ensure the high sensitivity of the microgyroscope. Constraints on the sensitivity and actuation voltage are extremely crucial to modern low-rate high-resolution microgyroscopes used in aerospace applications
Keywords :
CMOS integrated circuits; aerospace instrumentation; application specific integrated circuits; gyroscopes; microactuators; micromachining; ASIC; CMOS fully-integrated low-voltage vibratory microgyroscope; Comb drive; actuation voltage; aerospace applications; low-voltage bulk micromachined microgyroscope; parallel plate actuation; parasitic effect; sensitivity; silicon die; Angular velocity; Application specific integrated circuits; Capacitance; Capacitors; Damping; Electrostatics; Gyroscopes; Micromechanical devices; Springs; Temperature sensors;
Conference_Titel :
TENCON 2001. Proceedings of IEEE Region 10 International Conference on Electrical and Electronic Technology
Print_ISBN :
0-7803-7101-1
DOI :
10.1109/TENCON.2001.949708
