• DocumentCode
    3480889
  • Title

    Analysis on the microstructure of grating mechanical scored Aluminum film and mechanical properties

  • Author

    Baoqing Zhang ; Guoquan Shi ; Guangfeng Shi

  • Author_Institution
    Changchun Univ. of Sci. & Technol., Changchun, China
  • fYear
    2012
  • fDate
    Aug. 29 2012-Sept. 1 2012
  • Firstpage
    407
  • Lastpage
    410
  • Abstract
    At present time, grating mechanical scoring manufacture is process that diamond score reciprocates on the Aluminum film which is vacuum coating on the Chrome, glass and other substrates. As the structure and properties of stream Aluminum film affect the quality of groove greatly and are limited by the vacuum steam process, it is difficult to control and test the microstructure and mechanical properties of the film. In this paper, we recommend the new method that combine X-ray diffraction "nondestructive" test and nanopress-scratch testing technology. We can calculate the micro-structure, the aluminum film thickness and residual stress, analysis on the mechanical properties such as elastic modulus, hardness and stress-strain curve in this method in order to unveil the microstructure and mechanical properties of the aluminum film. Provide a feasible method for studying the microstructure and mechanical properties of the film and valuable reference and guidance on grating mechanical technology.
  • Keywords
    X-ray diffraction; aluminium; coating techniques; crystal microstructure; elastic moduli; hardness; internal stresses; metallic thin films; nondestructive testing; stress-strain relations; vacuum deposited coatings; vacuum deposition; Al; SiO2; X-ray diffraction nondestructive test; XRD; aluminum film thickness; chrome substrate; diamond score; elastic modulus; film mechanical properties; glass substrates; grating mechanical scored aluminum film microstructure; grating mechanical scoring manufacture; grating mechanical technology; groove quality; hardness; nanopress-scratch testing technology; residual stress; stream aluminum film properties; stream aluminum film structure; stress-strain curve; vacuum coating; vacuum steam process; Aluminum; Films; Gratings; Mechanical factors; Microstructure; Substrates; X-ray diffraction; film; grating; mechanical property; microstructure;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
  • Conference_Location
    Shaanxi
  • Print_ISBN
    978-1-4673-4588-0
  • Electronic_ISBN
    978-1-4673-4589-7
  • Type

    conf

  • DOI
    10.1109/3M-NANO.2012.6472961
  • Filename
    6472961