DocumentCode
3480889
Title
Analysis on the microstructure of grating mechanical scored Aluminum film and mechanical properties
Author
Baoqing Zhang ; Guoquan Shi ; Guangfeng Shi
Author_Institution
Changchun Univ. of Sci. & Technol., Changchun, China
fYear
2012
fDate
Aug. 29 2012-Sept. 1 2012
Firstpage
407
Lastpage
410
Abstract
At present time, grating mechanical scoring manufacture is process that diamond score reciprocates on the Aluminum film which is vacuum coating on the Chrome, glass and other substrates. As the structure and properties of stream Aluminum film affect the quality of groove greatly and are limited by the vacuum steam process, it is difficult to control and test the microstructure and mechanical properties of the film. In this paper, we recommend the new method that combine X-ray diffraction "nondestructive" test and nanopress-scratch testing technology. We can calculate the micro-structure, the aluminum film thickness and residual stress, analysis on the mechanical properties such as elastic modulus, hardness and stress-strain curve in this method in order to unveil the microstructure and mechanical properties of the aluminum film. Provide a feasible method for studying the microstructure and mechanical properties of the film and valuable reference and guidance on grating mechanical technology.
Keywords
X-ray diffraction; aluminium; coating techniques; crystal microstructure; elastic moduli; hardness; internal stresses; metallic thin films; nondestructive testing; stress-strain relations; vacuum deposited coatings; vacuum deposition; Al; SiO2; X-ray diffraction nondestructive test; XRD; aluminum film thickness; chrome substrate; diamond score; elastic modulus; film mechanical properties; glass substrates; grating mechanical scored aluminum film microstructure; grating mechanical scoring manufacture; grating mechanical technology; groove quality; hardness; nanopress-scratch testing technology; residual stress; stream aluminum film properties; stream aluminum film structure; stress-strain curve; vacuum coating; vacuum steam process; Aluminum; Films; Gratings; Mechanical factors; Microstructure; Substrates; X-ray diffraction; film; grating; mechanical property; microstructure;
fLanguage
English
Publisher
ieee
Conference_Titel
Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conference on
Conference_Location
Shaanxi
Print_ISBN
978-1-4673-4588-0
Electronic_ISBN
978-1-4673-4589-7
Type
conf
DOI
10.1109/3M-NANO.2012.6472961
Filename
6472961
Link To Document