DocumentCode :
348115
Title :
A new technique for treating fluorine wastewater to reduce sludge and running costs
Author :
Toyoda, Arata ; Taira, Tsutomu
Author_Institution :
NEC Corp., Sagamihara, Japan
fYear :
1999
fDate :
1999
Firstpage :
271
Lastpage :
274
Abstract :
This technique utilizes a small amount of Al(OH)3 not only as an aggregator for CaF2 but also as an effective fluorine adsorbent. The Al(OH)3 is used repeatedly through an Al(OH)3 reclamation process. This technique can effectively treat the concentrated fluorine wastewater and eliminate the high-level treatment step. We constructed a practical treatment system simply by modifying part of an existing conventional system. This new treatment system reduced both the total sludge and running costs to about one tenth those of a conventional treatment system
Keywords :
electronics industry; environmental factors; integrated circuit economics; waste disposal; water treatment; Al(OH)3; F; aggregator; reclamation process; running costs; semiconductor industry; sludge reduction; treatment system; wastewater treatment; Artificial intelligence; Costs; Industrial waste; National electric code; Sediments; Sludge treatment; Wastewater treatment;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA
ISSN :
1523-553X
Print_ISBN :
0-7803-5403-6
Type :
conf
DOI :
10.1109/ISSM.1999.808788
Filename :
808788
Link To Document :
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