DocumentCode
3481275
Title
Optoelectronic properties of low-temperature III-Vs
Author
Witt, Gerald L.
Volume
2
fYear
1994
fDate
31 Oct-3 Nov 1994
Firstpage
19
Abstract
Very high quality GaAs is routinely grown via molecular beam epitaxy (MBE) under the following growth conditions: substrate temperature (Ts)=600°C, As/Ga flux ratio≈10:1 and growth rate=1 μm/hr. It also is possible to grow crystalline GaAs by MBE under the conditions above except for Ts=200 °C. The author summarizes important physical constants for the annealed low temperature (LT) GaAs, using normal MBE GaAs for comparison. The properties of LT GaAs can be varied greatly by changing the growth and annealing parameters. LT growth has been extended to a number of other III-V materials including AlGaAs, InGaAs, InAlAs, GaP and InGaP
Keywords
Annealing; Bandwidth; Fingers; Gallium arsenide; III-V semiconductor materials; Molecular beam epitaxial growth; Optical materials; Photoconducting materials; Stripline; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE
Conference_Location
Boston, MA
Print_ISBN
0-7803-1470-0
Type
conf
DOI
10.1109/LEOS.1994.586290
Filename
586290
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