Development of a micro accelerometer based MOEMS

MEMS accelerometer sensors have been developed in decade years at various techniques such as piezoelectric, piezo-resistive, and micro capacitive etc. But the optical technology will bring the new activity and potential. In this paper, a accelerometer sensor based on the light transmission measurement and micro electromechanical system (MEMS) technology is proposed and simulated. Light power is coupled into the waveguide cantilever through the fiber. The intensity of comparison demodulation method is presented to analyze the relation between output signals and accelerometers. Theoretical analysis and simulation results are discussed.