Trajectory Planning of a Parallel Robot for Wafer Transfer

This paper deals with the trajectory planning of a full-rotate parallel robot for wafer transfer operations. With the path length in work space of the robot as parameter, the dynamic model is parameterized. The system constraints-input torque and velocity constraints and the task constraints-output velocity, acceleration, and jerk limits are set; with the minimized operation time as the optimization target, Quadratic programming method is used for path planning. The planning method is successfully applied in a series of parallel mechanisms.