Title :
3D simulation code for the modelling of beam line optics
Author :
Foad, Majeed A. ; Harrison, Bernard F. ; Marin, Tony
Author_Institution :
Implant Div., Appl. Mater., Horsham, UK
Abstract :
The use of ion optics simulation codes is becoming increasingly important for rapid design and development of ion optical components. In simulating ion beams with no cylindrical symmetry, e.g. ribbon beams, the use of 3D codes is particularly advantageous since end effects can be taken into account. In this paper, the KOBRA 3D simulation code has been used to simulate the production of decelerated beams produced using a PI9500xR beam line. Good qualitative agreement has been obtained between the experimental data and the theoretical simulation. The paper also highlights the benefits of using simulation codes in helping to understand the behaviour of the ion beam within the ion optical system
Keywords :
beam handling equipment; ion beams; ion optics; 3D simulation code; KOBRA; PI9500xR beam line; decelerated beam; ion beam; ion optics; modelling; ribbon beam; Boron; Computational modeling; Electrodes; Ion beams; Optical beams; Optical materials; Particle beam optics; Resistors; Space charge; Voltage;
Conference_Titel :
Ion Implantation Technology. Proceedings of the 11th International Conference on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-3289-X
DOI :
10.1109/IIT.1996.586296