Title :
Numerical simulation of time and temperature dependent polymer deformation in thermal imprint process
Author :
Takagi, H. ; Takahashi, M. ; Hiroshima, H. ; Maeda, R.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba
Abstract :
A finite element simulation tool for thermal imprint process has been developed. In the system, polymer is assumed to be a visco-elastic body represented by the generalized Maxwell model. We experimentally measured visco-elastic properties of a polymer material and derived parameters used in the simulation tool. Using the same polymer material, we performed imprint experiments to examine time and temperature dependent polymer deformation. Comparing the polymer deformations in simulated results with those in experiments, we confirmed that the developed simulation tool and the measured material parameters were useful for analysis of thermal imprint process.
Keywords :
Maxwell equations; finite element analysis; plastic deformation; viscoelasticity; finite element simulation tool; generalized Maxwell model; numerical simulation; thermal imprint process; time-temperature dependent polymer deformation; viscoelastic body; Analytical models; Cooling; Deformable models; Frequency measurement; Numerical models; Numerical simulation; Polymers; Solid modeling; Temperature dependence; Temperature measurement;
Conference_Titel :
Portable Information Devices, 2008 and the 2008 7th IEEE Conference on Polymers and Adhesives in Microelectronics and Photonics. PORTABLE-POLYTRONIC 2008. 2nd IEEE International Interdisciplinary Conference on
Conference_Location :
Garmish-Partenkirchen
Print_ISBN :
978-1-4244-2141-1
Electronic_ISBN :
978-1-4244-2142-8
DOI :
10.1109/PORTABLE-POLYTRONIC.2008.4681299
