Construction analysis for inherent reliability evaluation of surface acoustic wave filters

Inherent reliability of Surface acoustic wave filters plays a key role for its application in the mobile communication systems. Construction analysis is an effective method for evaluating the inherent reliability of electronic components. This work provides a construction analysis process for the surface acoustic wave filters, which includes external encapsulation analysis, internal encapsulation analysis and chip-level analysis. The results show that oxidation occurs on the upper surface of the Al electrodes and leads to the formation of Al₂O₃. The break in the Al electrode stripe is observed.