Title :
Frequency characteristics of calculable thin-film multijunction thermal converters above 1 MHz
Author :
Fujiki, H. ; Amagai, Y.
Author_Institution :
Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan
Abstract :
Thin film multijunction thermal converters (MJTC) have been developed and their frequency characteristics above 1 MHz have been calculated. Practical thin film MJTCs are separately produced on a high thermal conductivity AlN chip for the heater, mounted on a polyimide film for thermocouples. On one of the plus sides for our MJTCs, by sputtering heater compounds on an AlN substrate acting as a heatsink, the nominal current increases as compared with traditional single-junction thermal converters. The nominal voltage of a 50 Ω heater resistor is about 2.5 V. This paper describes the frequency characteristics of our MJTCs to be used as a standard from 1 MHz up to 50 MHz.
Keywords :
sputtering; thermal conductivity; thermocouples; thin film devices; frequency 1 MHz to 50 MHz; high thermal conductivity; polyimide film; resistance 50 ohm; single junction thermal converter; sputtering heater; thermocouple; thin film multijunction thermal converter; voltage 2.5 V; Aluminum oxide; Analog-digital conversion; Chromium; Dielectric losses; Electrodes; Frequency conversion; Polyimides; Substrates; Thermal conductivity; Transistors;
Conference_Titel :
Precision Electromagnetic Measurements (CPEM), 2010 Conference on
Conference_Location :
Daejeon
Print_ISBN :
978-1-4244-6795-2
DOI :
10.1109/CPEM.2010.5544555
