Title :
Average power scaling of an SBS phase conjugated Nd:glass amplifier for photolithography
Author :
Dane, C. Brent ; Hacker, L.A.
Author_Institution :
Lawrence Livermore Nat. Lab., CA, USA
fDate :
31 Oct-3 Nov 1994
Abstract :
A prototype of a high average power x-ray point source pumped by a Nd:glass high beam quality laser amplifier system has been developed. Average x-ray powers of >10W in the spectral range of 0.8-1.2 nm can be delivered in steady-state, continuous operation. The output can also be configured for 2 second bursts of 40 W average x-ray power with -5 seconds between each burst
Keywords :
neodymium; 0.18 mum; 0.8 to 1.2 nm; 10 W; 2 s; 40 W; 5 s; Nd:glass high beam quality laser amplifier system; SBS phase conjugated Nd:glass amplifier; average power scaling; average x-ray power; average x-ray powers; high average power x-ray point source; photolithography; spectral range; steady-state continuous operation; Laser excitation; Lithography; Optical amplifiers; Optical pulses; Power amplifiers; Power generation; Power lasers; Pulse amplifiers; Pump lasers; X-ray lasers;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1994. LEOS '94 Conference Proceedings. IEEE
Conference_Location :
Boston, MA
Print_ISBN :
0-7803-1470-0
DOI :
10.1109/LEOS.1994.586326
