Title :
2.45 GHz electromagnetic field sensor studies
Author :
Buiculescu, Cristina
Author_Institution :
Nat. Inst. of Res. & Dev. for Microtechnol., Bucharest, Romania
Abstract :
This paper presents the studies and experiments performed to design and manufacture a fully integrated 2.45 GHz electromagnetic field sensor using hybrid techniques and specific silicon microtechnologies
Keywords :
UHF antennas; UHF detectors; UHF integrated circuits; UHF measurement; dipole antennas; electric sensing devices; electromagnetic fields; elemental semiconductors; monopole antennas; silicon; 2.45 GHz; Si; design; dipole antennas; electromagnetic field sensor; fully integrated electromagnetic field sensor; hybrid techniques; manufacture; monopole antennas; silicon microtechnologies; Antenna measurements; Current measurement; Dipole antennas; Electromagnetic fields; Electromagnetic measurements; Energy measurement; Frequency; Magnetic sensors; Resonance; Sensor phenomena and characterization;
Conference_Titel :
Semiconductor Conference, 1999. CAS '99 Proceedings. 1999 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-5139-8
DOI :
10.1109/SMICND.1999.810520