Fabrication of mass sensitive piezoresistive cantilever structure for biochemical detection

Author

Firdaus, S.M. ; Omar, Husna ; Azid, Ishak Abd

Author_Institution

Fac. of Mech. Eng., Univ. Technol. MARA (UiTM), Permatang Pauh, Malaysia

fYear

2011

fDate

5-6 Dec. 2011

Firstpage

530

Lastpage

532

Abstract

This paper reports a mechanical micro-structure MEMS (Micro-Electricomechanical System) based sensor fabrication using CMOS platform for biochemical detection. The structure is monolithically integrated with the detection circuit/ readout circuit. Silicon dioxide layer is implemented in the current MEMS structure as an absorption layer for bio targets by CMOS process tools. Result shows that the fabricated piezoresistive cantilever MEMS have linear relation output voltage respond with the different weight of DNA applied.

Keywords

CMOS integrated circuits; DNA; biosensors; cantilevers; chemical sensors; microsensors; piezoresistive devices; silicon compounds; CMOS platform; DNA; SiO₂; biochemical detection; detection circuit; linear relation output voltage; mass sensitive piezoresistive cantilever structure; mechanical microstructure MEMS; micro-electromechanical system; readout circuit; sensor fabrication; silicon dioxide layer; Bridge circuits; DNA; Educational institutions; Fabrication; Micromechanical devices; Piezoresistance; Stress; Biosensor; MEMS; Micro structure; Piezoresistive;

fLanguage

English

Publisher

ieee

Conference_Titel

Humanities, Science and Engineering (CHUSER), 2011 IEEE Colloquium on

Conference_Location

Penang

Print_ISBN

978-1-4673-0021-6

Type

conf

DOI

10.1109/CHUSER.2011.6163788

Filename

6163788