Modeling of a MEMS-based display device with electric-mechanical coupling

MEMS-based display with interferometric modulation (IMOD) is a new technology breakthrough that shows substantial performance, such as a significant reduction in power consumption, extending device battery life, no backlighting. The display consists of a suspended conductive membrane serving as a mirror over a partially reflective optical stack. In this paper, the mechanical response and the electrostatic interaction between the membrane and the substrate are studied, taking the mechanical-electrostatic coupling into account. The parameters of the model are abstracted from observation of the real structure, and can provide useful information for the engineer to improve the design on the structure reliability. It shows that the thickness of the membrane plays a key role for the deflection when subjecting to an electric voltage. The simulation could provide useful information for the engineer to improve the design on the structure reliability.