Ion source improvement program for the Varian VIISion ion implanter

Author

Gammel, G. ; Pennisi, T. ; Smatlak, D. ; Sullivan, P. ; Bell, D. ; Custer, D. ; McCullough, M.

Author_Institution

Varian Ion Implant Syst., Gloucester, MA, USA

fYear

1996

fDate

16-21 Jun 1996

Firstpage

404

Lastpage

406

Abstract

In our continuous program of ion source improvement, we have two main goals in mind. First and foremost is improving lifetime consistency, and identifying factors that increase lifetime such as optimizing arc voltage. Results of numerous lifetime studies at Varian and at Micron are presented. We assess the pros and cons of filament insulators (presently there are no insulators). Test results are presented, along with their effect on gas flow. We are also focusing on improving the repeller design and assembly technique, and gas feed modifications. Results of these investigations are presented

Keywords

arcs (electric); ion implantation; ion sources; life testing; particle beam diagnostics; Varian VIISion ion implanter; arc voltage optimization; filament insulators; gas feed modifications; gas flow; ion source improvement program; lifetime consistency; lifetime tests; repeller assembly technique; repeller design; source magnet polarity; test results; Assembly; Continuous improvement; Europe; Feeds; Fluid flow; Insulation; Ion sources; Life testing; Lifetime estimation; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Ion Implantation Technology. Proceedings of the 11th International Conference on

Conference_Location

Austin, TX

Print_ISBN

0-7803-3289-X

Type

conf

DOI

10.1109/IIT.1996.586375

Filename

586375