Integration of a micro 2/sup N/-level quantized binary Fresnel lens on a micro XY-stage

In certain applications, diffractive optical elements have more significant benefits than refractive or reflective elements because of their light volume and specific optical characteristics such as the ability for multiple simultaneous focal points. A micro Fresnel lens was designed and fabricated following the principles of a binary lens on silicon and glass substrates using micromachining. The micro XY-stage was also fabricated on single crystalline silicon as a positioning actuator. Lastly integration of these two parts to one system was proposed. The integrated optic system will be helpful to control the position of a light beam.