Title :
Development of micro actuator using shape memory alloy thin film
Author :
Ikuta, Koji ; Fujita, Hiroyuki ; Arimoto, Suguru ; Ikeda, Michiaki ; Yamashita, Shinji
Author_Institution :
Dept. of Mech. Syst. Eng., Kyushu Inst. of Technol., Fukuoka, Japan
Abstract :
Basic research for the micro actuator using TiNi shape memory alloy (SMA) is conducted from the crystallographic point of view. SMA (TiNi) thin film is fabricated by sputter deposition. First, the influence of substrate temperature on crystal structure is verified by measuring resistivity-temperature curve and X-ray diffraction. Though high temperature substrate conditions make TiNi film in regular crystal, an amorphous structure appears at low substrate temperature. Next optimal composition of sputtered SMA thin film is found by SSQ. The negative slope of the resistivity curve due to phase transformation between R-phase and parent phase is observed. Finally, annealing methods are examined to crystallize amorphous TiNi
Keywords :
annealing; crystal atomic structure of alloys; crystallisation; martensitic transformations; micromechanical devices; nickel alloys; shape memory effects; sputtered coatings; titanium alloys; R-phase; TiNi; X-ray diffraction; amorphous structure; annealing; crystal structure; crystallization; martensitic transformations; micro actuator; resistivity-temperature curve; shape memory alloy thin film; sputter deposition; substrate temperature; Amorphous materials; Crystallization; Crystallography; Microactuators; Shape memory alloys; Sputtering; Substrates; Temperature; Transistors; X-ray diffraction;
Conference_Titel :
Intelligent Robots and Systems '90. 'Towards a New Frontier of Applications', Proceedings. IROS '90. IEEE International Workshop on
Conference_Location :
Ibaraki
DOI :
10.1109/IROS.1990.262533
